Word.ws English Dictionary

epitaxial

epitaxial adjective: of, pertaining to, or employing epitaxy.

Adjective

epitaxial (not comparable)

  1. Of, pertaining to, or employing epitaxy
    • It should be noted that a high temperature anneal in Ar, H₂, or high vacuum is a well established pre-epitaxial growth step by which a native oxide film is removed to obtain a good quality epitaxial layer[…].1994, D. M. Lee, D. Ruprecht, D. Hymes, W. Huber, “Surface Characterization of Heat Treated Silicon Wafers”, in H[oward] R. Huff, W. Bergholz, K[ōji] Sumino, editors, Semiconductor Silicon/1994...

Origin of epitaxial

From epitaxy + -al.

Words formed from epitaxial

Phrases with epitaxial

Questions about epitaxial

What does epitaxial mean?
Epitaxial means of, pertaining to, or employing epitaxy.
What part of speech is epitaxial?
Epitaxial is an adjective.

Words near epitaxial in the dictionary

  1. epitaphs
  2. epitaphy
  3. epitarsus
  4. epitases
  5. epitasis
  6. epitaxial
  7. epitaxial layer
  8. epitaxial layers
  9. epitaxiality
  10. epitaxially
  11. epitaxic

Source and license

Adapted from Wiktionary: epitaxial (page history and authors). Text available under the Creative Commons Attribution-ShareAlike 4.0 license. Word.ws reformatted the entry and added links. Wiktionary data of 2026-09-02.

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Cite this entry: “epitaxial.” Word.ws, https://word.ws/epitaxial. Based on Wiktionary, CC BY-SA 4.0.